Manufacturing and Macroscopic Properties of Cold Sprayed Cu-In Coating Material for Sputtering Target

[1]  H. Liao,et al.  Effect of heat treatment on microstructure and mechanical properties of cold sprayed Ti coatings with relatively large powder particles , 2009 .

[2]  J. Sarkar,et al.  Surface characteristics of titanium targets and their relevance to sputtering performance , 2009 .

[3]  Ik-Hyun Oh,et al.  Fabrication and Evaluation of Tantalum Compacts for Sputtering Target Application , 2008 .

[4]  Christian Coddet,et al.  Microstructure, microhardness and dry friction behavior of cold-sprayed tin bronze coatings , 2007 .

[5]  M. Nouiri,et al.  Effect of substrate temperature and source grain size on the structural and electrical properties of CSVT grown Cu(In1−xGax)Se2 thin films , 2007 .

[6]  S. Joshi,et al.  Effect of Process Parameters and Heat Treatments on Properties of Cold Sprayed Copper Coatings , 2007 .

[7]  Deliang Zhang,et al.  Fabrication of TiAl Target by Mechanical Alloying and Applications in Physical Vapour Deposition Coating , 2007 .

[8]  Yongfu Zhu,et al.  Improvement of Zr film purity by using a purified sputtering target and negative substrate bias voltage , 2006 .

[9]  Anatolii Papyrin,et al.  Cold Spray Technology , 2006 .

[10]  H. Fang,et al.  The bond strength of Al-Si coating on mild steel by kinetic spraying deposition , 2006 .

[11]  Frank Gärtner,et al.  Microstructures and key properties of cold-sprayed and thermally sprayed copper coatings , 2006 .

[12]  C. Lo,et al.  Influence of tungsten sputtering target density on physical vapor deposition thin film properties , 2005 .

[13]  S. Tsukimoto,et al.  The Effect of Target Purities on Grain Growth in Sputtered Copper Thin Films , 2005 .

[14]  Hans Zogg,et al.  CIS and CIGS layers from selenized nanoparticle precursors , 2003 .

[15]  P. Fons,et al.  Properties of CuInGaSe2 solar cells based upon an improved three-stage process , 2003 .

[16]  T. Nakano,et al.  Alloying and electrical properties of evaporated Cu–In bilayer thin films , 1998 .

[17]  Enn Mellikov,et al.  SEM analysis and selenization of Cu–In alloy films produced by co-sputtering of metals , 2009 .

[18]  V. Steenkiste,et al.  Kinetic Spray: A New Coating Process , 2001 .