Investigation on Pull-in Voltage, Frequency Tuning and Frequency Stability of MEMS Devices Incorporating Casimir Force with Correction for Finite Conductivity

[1]  Cheng Li,et al.  Transverse Vibration and Wave Propagation of Functionally Graded Nanobeams with Axial Motion , 2020, Journal of Vibration Engineering & Technologies.

[2]  Cheng Li,et al.  Impact Behaviors of Cantilevered Nano-beams Based on the Nonlocal Theory , 2019, Journal of Vibration Engineering & Technologies.

[3]  Shashank Soni,et al.  Effect of Fluid–Structure Interaction on Vibration and Deflection Analysis of Generally Orthotropic Submerged Micro-plate with Crack Under Thermal Environment: An Analytical Approach , 2019, Journal of Vibration Engineering & Technologies.

[4]  Shaker A. Meguid,et al.  Dynamic behavior of micro-resonator under alternating current voltage , 2017 .

[5]  D. Vakharia,et al.  Closed-form relation to predict static pull-in voltage of an electrostatically actuated clamped–clamped microbeam under the effect of Casimir force , 2017 .

[6]  Ashok Kumar Pandey,et al.  Effect of coupled modes on pull-in voltage and frequency tuning of a NEMS device , 2013 .

[7]  H. Haddadpour,et al.  The effect of small scale on the pull-in instability of nano-switches using DQM , 2013 .

[8]  Dimitrios Peroulis,et al.  Estimating residual stress, curvature and boundary compliance of doubly clamped MEMS from their vibration response , 2013 .

[9]  Sritawat Kitipornchai,et al.  Pull-in instability and free vibration of electrically actuated poly-SiGe graded micro-beams with a curved ground electrode , 2012 .

[10]  D. N. Pawaskar,et al.  Investigation of the internal stress effects on static and dynamic characteristics of an electrostatically actuated beam for MEMS and NEMS application , 2011 .

[11]  Sébastien Baguet,et al.  Computational and quasi-analytical models for non-linear vibrations of resonant MEMS and NEMS sensors , 2011 .

[12]  S. Kitipornchai,et al.  Free vibration of geometrically nonlinear micro-switches under electrostatic and Casimir forces , 2010 .

[13]  H. Haddadpour,et al.  Investigating the effect of Casimir and van der Waals attractions on the electrostatic pull-in instability of nano-actuators , 2010 .

[14]  Aurelio Soma,et al.  Dynamic identification of electrostatically actuated MEMS in the frequency domain , 2010 .

[15]  Stefanie Gutschmidt,et al.  The Influence of Higher-Order Mode Shapes for Reduced-Order Models of Electrostatically Actuated Microbeams , 2010 .

[16]  Liwei Lin,et al.  A closed-form approach for frequency tunable comb resonators with curved finger contour , 2008 .

[17]  S. Kitipornchai,et al.  Pull-in instability of nano-switches using nonlocal elasticity theory , 2008 .

[18]  M. Porfiri,et al.  Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates , 2008, Sensors.

[19]  P. V. Zwol,et al.  Influence of random roughness on the Casimir force at small separations , 2007, 0712.1893.

[20]  G. Rezazadeh,et al.  Application of the Generalized Differential Quadrature Method to the Study of Pull-In Phenomena of MEMS Switches , 2007, Journal of Microelectromechanical Systems.

[21]  A. Alasty,et al.  Analytical investigation and numerical verification of Casimir effect on electrostatic nano-cantilevers , 2007 .

[22]  Thomas W. Kenny,et al.  Temperature-compensated high-stability silicon resonators , 2007 .

[23]  G. J. Delben,et al.  Influence of the Casimir force on the pull-in parameters of silicon based electrostatic torsional actuators , 2007 .

[24]  M. Mehregany,et al.  Characterization of frequency tuning using focused ion beam platinum deposition , 2007 .

[25]  James Hone,et al.  Electrothermal frequency tuning of a nano-resonator , 2006 .

[26]  Michael L. Roukes,et al.  Tuning nonlinearity, dynamic range, and frequency of nanomechanical resonators , 2006 .

[27]  Yapu Zhao,et al.  Numerical and Analytical Study on the Pull-in Instability of Micro-Structure under Electrostatic Loading , 2006 .

[28]  M. Dunn,et al.  The role of van der Waals forces in adhesion of micromachined surfaces , 2005, Nature materials.

[29]  Seiji Akita,et al.  Carbon nanotube oscillators toward zeptogram detection , 2005 .

[30]  David Elata,et al.  Analysis of a novel method for measuring residual stress in micro-systems , 2005 .

[31]  Ya-Pu Zhao,et al.  Nonlinear behavior for nanoscale electrostatic actuators with Casimir force , 2005 .

[32]  W. Lin,et al.  Casimir effect on the pull-in parameters of nanometer switches , 2005 .

[33]  R. L. Badzey,et al.  Temperature dependence of a nanomechanical switch , 2005, cond-mat/0503259.

[34]  Narayana R Aluru,et al.  Static and Dynamic Analysis of Carbon Nanotube-Based Switches , 2004 .

[35]  J. Kuang,et al.  Dynamic characteristics of shaped micro-actuators solved using the differential quadrature method , 2004 .

[36]  M. Denhoff.  A measurement of Young's modulus and residual stress in MEMS bridges using a surface profiler , 2003 .

[37]  L. Shampine,et al.  Solving ODEs with MATLAB , 2003 .

[38]  Ali H. Nayfeh,et al.  Characterization of the mechanical behavior of an electrically actuated microbeam , 2002 .

[39]  Ai Qun Liu,et al.  Mechanical design and optimization of capacitive micromachined switch , 2001 .

[40]  Liwei Lin,et al.  Active frequency tuning for micro resonators by localized thermal stressing effects , 2001 .

[41]  G. L. Klimchitskaya,et al.  Higher-order conductivity corrections to the Casimir force , 2000 .

[42]  G. L. Klimchitskaya,et al.  Casimir and van der Waals forces between two plates or a sphere (lens) above a plate made of real metals , 2000, quant-ph/0003093.

[43]  G. J. Maclay,et al.  The anharmonic Casimir oscillator (ACO)-the Casimir effect in a model microelectromechanical system , 1995 .

[44]  G. L. Klimchitskaya,et al.  Corrections to the van der Waals forces in application to atomic force microscopy , 1995 .

[45]  H. Tilmans,et al.  Electrostatically driven vacuum-encapsulated polysilicon resonators part II. theory and performance , 1994 .

[46]  A. Bokaian,et al.  Natural frequencies of beams under compressive axial loads , 1988 .

[47]  S. Kitipornchai,et al.  Pull-in instability of geometrically nonlinear micro-switches under electrostatic and Casimir forces , 2011 .

[48]  D. N. Pawaskar,et al.  Closed-form empirical relations to predict the static pull-in parameters of electrostatically actuated microcantilevers having linear width variation , 2011 .

[49]  D. Roberts,et al.  On the attraction between two perfectly conducting plates , 2011 .

[50]  Jian-Gang Guo,et al.  Influence of van der Waals and Casimir forces on electrostatic torsional actuators , 2004, Journal of Microelectromechanical Systems.

[51]  S. Lamoreaux.  The Casimir force: background, experiments, and applications , 2004 .

[52]  E. Lifshitz.  The theory of molecular attractive forces between solids , 1956 .