Rib Microring Resonators in Lithium Niobate on Insulator

Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO<sub>3</sub>) bonded to 1.8 μm of SiO<sub>2</sub> and an LiNbO<sub>3</sub> substrate. Measurement results show a Q-factor of 2800 as well as a modulation depth of 18.7 dB.

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