미소 힘 측정을 위한 이중 전자기힘 보상방법

【Micro force measurement is required more frequently for a precision manufacturing and investment in fields of precision industries such as semiconductor, chemistry and biology, and so forth. Null balance method has been introduced as an alternative of a loadcell. Loadcells have advantages in aspects of low cost and easy manufacturing, but have also the limitation in resolution and sensitivity to environment variations. In this paper, null balance method is explained and the dominant parameters related to system performances are mentioned. Null position sensor, electromagnetic system and controller are investigated. Also, the characteristic experiment is carried out in order to estimate the resolution and the measurement range. In order to overcome the limitation by the drift of position sensor and the performance of controller, double electromagnetic force compensation method is proposed and experimented. After controlling and filtering, the resolution under $\pm$ 1mg and measurement range over 300g could be obtained.】