Nano-stage 검증용 원판형 정전용량 센서 개발

A disk-type capacitive sensor is developed for acceptance test of a nano-stage. The capacitance between the sensor disk and rotor depends on both the air gap and the mutual area overlap, which contain three dimensional position information of the target rotor. The developed sensor has a wide measurement range since the sensor detects the capacitance variation due to the area change the target moreover, the manufacturing cost is very cheap because and the sensor can be made with a printed circuit board. First, effects of mechanical errors: the irregular air gap, the target roundness and the sensor installation errors on the measuring process of the proposed sensor were analyzed, and the sensor design criterion is discussed. A test rig was built and the effectiveness of the proposed sensor was verified through experiments.