Chalcogenide glass waveguide-integrated black phosphorus mid-infrared photodetectors

Black phosphorus (BP) is a promising 2D material that has unique in-plane anisotropy and a 0.3 eV direct bandgap, making it an attractive material for mid-IR photodetectors. So far, waveguide integrated BP photodetectors have been limited to the near-IR on top of Si waveguides that are unable to account for BP's crystalline orientation. In this work, we employ mid-IR transparent chalcogenide glass (ChG) both as a broadband mid-IR transparent waveguiding material to enable waveguide-integration of BP detectors, and as a passivation layer to prevent BP degradation during device processing as well as in ambient atmosphere post-fabrication. Our ChG-on-BP approach not only leads to the first demonstration of mid-IR waveguide-integrated BP detectors, but also allows us to fabricate devices along different crystalline axes of BP to investigate, for the first time, the impact of in-plane anisotropy on photoresponse of waveguide-integrated devices. The best device exhibits responsivity up to 40 mA W−1 and noise equivalent power as low as 30 pW Hz−1/2 at 2185 nm wavelength. We also found that photodetector responsivities changed by an order of magnitude with different BP orientations. This work validates BP as an effective photodetector material in the mid-IR, and demonstrates the power of the glass-on-2D-material platform for prototyping of 2D material photonic devices.

[1]  David J. Moss,et al.  Photosensitive post-tuning of chalcogenide photonic crystal waveguides , 2007 .

[2]  Craig B. Arnold,et al.  Nonlinear optical waveguides in As 2 S 3 -Ag 2 S chalcogenide glass thin films , 2017 .

[3]  Qing Hua Wang,et al.  Electronics and optoelectronics of two-dimensional transition metal dichalcogenides. , 2012, Nature nanotechnology.

[4]  Wei Ji,et al.  High-mobility transport anisotropy and linear dichroism in few-layer black phosphorus , 2014, Nature communications.

[5]  Anupama Yadav,et al.  Monolithically integrated stretchable photonics , 2017, Light: Science & Applications.

[6]  Hongtao Lin,et al.  Integrated flexible chalcogenide glass photonic devices , 2014, Nature Photonics.

[7]  A. Ferrari,et al.  Graphene Photonics and Optoelectroncs , 2010, CLEO 2012.

[8]  M D Pelusi,et al.  Long, low loss etched As(2)S(3) chalcogenide waveguides for all-optical signal regeneration. , 2007, Optics express.

[9]  Jerome Michon,et al.  Ultra-thin, High-efficiency Mid-Infrared Transmissive Huygens Meta-Optics , 2017 .

[10]  Yi Yu,et al.  A broadband, quasi‐continuous, mid‐infrared supercontinuum generated in a chalcogenide glass waveguide , 2014 .

[11]  Yubing Zhou,et al.  Strong Second-Harmonic Generation in Atomic Layered GaSe. , 2015, Journal of the American Chemical Society.

[12]  Nathan Youngblood,et al.  Waveguide-integrated black phosphorus photodetector with high responsivity and low dark current , 2014, Nature Photonics.

[13]  Nathan Youngblood,et al.  Three-Dimensional Integration of Black Phosphorus Photodetector with Silicon Photonics and Nanoplasmonics. , 2017, Nano letters.

[14]  G. Steele,et al.  Fast and broadband photoresponse of few-layer black phosphorus field-effect transistors. , 2014, Nano letters.

[15]  Craig B. Arnold,et al.  A review on solution processing of chalcogenide glasses for optical components , 2013 .

[16]  Bruno Bureau,et al.  Telluride glasses for far infrared photonic applications , 2013 .

[17]  J. David Musgraves,et al.  Laser-induced structural modification, its mechanisms, and applications in glassy optical materials , 2011 .

[18]  Pao Tai Lin,et al.  Inverted-Rib Chalcogenide Waveguides by Solution Process , 2014 .

[19]  Aaron M. Jones,et al.  Highly anisotropic and robust excitons in monolayer black phosphorus. , 2014, Nature nanotechnology.

[20]  Nathan Youngblood,et al.  Integration of 2D materials on a silicon photonics platform for optoelectronics applications , 2016 .

[21]  Daniel W. Hewak,et al.  Fabrication and characterization of femtosecond laser written waveguides in chalcogenide glass , 2007, 2110.10471.

[22]  Kenneth L. Shepard,et al.  Chip-integrated ultrafast graphene photodetector with high responsivity , 2013, Nature Photonics.

[23]  Xianfan Xu,et al.  Phosphorene: an unexplored 2D semiconductor with a high hole mobility. , 2014, ACS nano.

[24]  Mingqiang Huang,et al.  Broadband Black‐Phosphorus Photodetectors with High Responsivity , 2016, Advanced materials.

[25]  F. Xia,et al.  Rediscovering black phosphorus as an anisotropic layered material for optoelectronics and electronics. , 2014, Nature communications.

[26]  Zhixian Zhou,et al.  Polarized photocurrent response in black phosphorus field-effect transistors. , 2014, Nanoscale.

[27]  Jing Kong,et al.  Chalcogenide glass-on-graphene photonics , 2017, 2017 Conference on Lasers and Electro-Optics (CLEO).

[28]  Xiang Shen,et al.  Systematic z-scan measurements of the third order nonlinearity of chalcogenide glasses , 2014 .

[29]  Xianfan Xu,et al.  Phosphorene: an unexplored 2D semiconductor with a high hole mobility. , 2014, ACS nano.

[30]  B. Bureau,et al.  Telluride glasses with far-infrared transmission up to 35 μm , 2017 .

[31]  Hongtao Lin,et al.  High‐Performance, High‐Index‐Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non‐planar Substrates , 2013 .

[32]  Ping Zhang,et al.  Flexible integrated photonics: where materials, mechanics and optics meet [Invited] , 2013 .

[33]  Christos Riziotis,et al.  Development of channel waveguide lasers in Nd3+-doped chalcogenide (Ga:La:S) glass through photoinduced material modification , 2002 .

[34]  Benjamin J. Eggleton,et al.  Chalcogenide glass advanced for all-optical processing , 2007 .

[35]  E. Bonhomme,et al.  Te-rich Ge–As–Se–Te bulk glasses and films for future IR-integrated optics , 2007 .

[36]  Wei Zhang,et al.  Low-loss photonic device in Ge-Sb-S chalcogenide glass. , 2016, Optics letters.

[37]  Phaedon Avouris,et al.  Black phosphorus photodetector for multispectral, high-resolution imaging. , 2014, Nano letters.

[38]  Daniel Schall,et al.  50 GBit/s Photodetectors Based on Wafer-Scale Graphene for Integrated Silicon Photonic Communication Systems , 2014 .

[39]  Stephen Kozacik,et al.  Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators. , 2013, Optics letters.

[40]  Mo Li,et al.  Optical absorption in graphene integrated on silicon waveguides , 2012 .

[41]  Qiangfei Xia,et al.  Black Phosphorus Mid-Infrared Photodetectors with High Gain. , 2016, Nano letters.

[42]  Wei Lu,et al.  Room temperature high-detectivity mid-infrared photodetectors based on black arsenic phosphorus , 2017, Science Advances.

[43]  Vibhor Singh,et al.  Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping , 2013, 1311.4829.

[44]  Hongtao Lin,et al.  Demonstration of mid-infrared waveguide photonic crystal cavities. , 2013, Optics letters.

[45]  Trevor M. Benson,et al.  Fabrication of stable, low optical loss rib-waveguides via embossing of sputtered chalcogenide glass-film on glass-chip , 2015 .

[46]  Fengnian Xia,et al.  Two-dimensional materials for nanophotonics application , 2015 .

[47]  Kathleen Richardson,et al.  Comparison of the optical, thermal and structural properties of Ge–Sb–S thin films deposited using thermal evaporation and pulsed laser deposition techniques , 2011 .

[48]  J. David Musgraves,et al.  Chalcogenide glass microphotonics : Stepping into the spotlight , 2015 .

[49]  R. Baets,et al.  Broadband 10Gb/s graphene electro-absorption modulator on silicon for chip-level optical interconnects , 2014, 2014 IEEE International Electron Devices Meeting.