Line-width roughness analysis of EUV resists after development in homogenous CO2 solutions using CO2 compatible salts (CCS) by a three-parameter model
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Evangelos Gogolides | Mark Wagner | James DeYoung | Chris Harbinson | Vassilios Constantoudis | George P. Patsis | E. Gogolides | V. Constantoudis | G. Patsis | M. Wagner | J. Deyoung | C. Harbinson
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