Fabrication of a wearable fabric tactile sensor produced by artificial hollow fiber

An artificial-hollow-fiber structure as a new material for MEMS was developed and applied to a novel type of fabric tactile sensor. The artificial hollow fiber was fabricated by uniformly deposited metal and insulation layers on the surface of an elastic tube. A special rotating mechanism for uniformly depositing a metal layer on the tube surface during sputtering was developed. A rectangular-shaped fabric tactile sensor was produced by combining artificial hollow fibers and typical cotton yarns, like a cloth. The sensor can detect a contact force by measuring changes in capacitance at all intersection points of the artificial hollow fibers. Two different types of wearable-tactile-sensor glove, a patched type and a direct knit type, were also fabricated, and it was confirmed that both types can detect a normal load by measuring the capacitance change.

[1]  S. Middelhoek,et al.  Silicon Three-axial Tactile Sensor , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[2]  Ronald S. Fearing,et al.  A surface micromachined microtactile sensor array , 1996, Proceedings of IEEE International Conference on Robotics and Automation.

[3]  B. J. Kane,et al.  A traction stress sensor array for use in high-resolution robotic tactile imaging , 2000, Journal of Microelectromechanical Systems.

[4]  Wilfried Mokwa,et al.  CMOS-compatible capacitive high temperature pressure sensors , 2000 .

[5]  Chang Liu,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering Development of Polyimide Flexible Tactile Sensor Skin , 2022 .

[6]  Douglas L. Jones,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering Texture Classification Using a Polymer-based Mems Tactile Sensor , 2022 .

[7]  Hyung-Kew Lee,et al.  A Flexible Polymer Tactile Sensor: Fabrication and Modular Expandability for Large Area Deployment , 2006, Journal of Microelectromechanical Systems.

[8]  N. Chen,et al.  Flexible Skin with Two-Axis Bending Capability Made Using Weaving-By-Lithography Fabrication Method , 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.

[9]  K.R. Lee,et al.  3-Axes Flexible Tactile Sensor Fabricated by Si Micromachining and Packaging Technology , 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.

[10]  Yasuhisa Hasegawa,et al.  An active tactile sensor for detecting mechanical characteristics of contacted objects , 2006 .

[11]  E. Hwang,et al.  A Polymer-Based Flexible Tactile Sensor for Both Normal and Shear Load Detections and Its Application for Robotics , 2007, Journal of Microelectromechanical Systems.

[12]  Makoto Ishida,et al.  A Robust and Sensitive Silicon-MEMS Tactile-Imager with Scratch Resistant Surface and Over-Range Protection , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.