반도체 클린룸용 외기공조시스템의 에너지소비량 실시간 비교를 위한 Twin 클린룸 기초실험

In the present study, an experiment was conducted to measure the energy saving of air washer type outdoor air conditioning system compared with electrode-boiler steam humidification type one. It was shown from Twin clean rooms experiments with an outdoor air flow of 3,000 m3/h that the air washer type outdoor air conditioning system was more energy efficient than the steam humidification type one.