Kalman Filtering Applied to Weak Force Measurement and Control in the Microworld

Dexterous manipulation of small components and assembly of microsystems require measurement and control of gripping forces. In the microworld,1 the main limitation for force sensing is the low signal to noise ratio making very difficult to achieve efficient force measurements when useful signals magnitudes are close to noise level. Thus, optimal filters allowing both filtering the noise without loss of dynamic measurements and an easy real time implementation for force control are required. This chapter deals with gripping force measurement and control in the microworld describing successful uses of the optimal Kalman filtering to overcome the limitations due to noise. Two applications are then presented: the first one focuses on the improvement of strain gauges micro-forces measurement using an optimal Kalman filter, and the second one describes a successful implementation of a LQG (Linear–quadratic–Gaussian) gripping force controller on an electrostatic microgripper for the dexterous manipulation of 80 μm glass balls.

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