High-density MIM capacitors (/spl sim/85 nF/cm/sup 2/) on organic substrates
暂无分享,去创建一个
R. Kumar | E.B. Liao | N. Balasubramanian | L.H. Guo | D.L. Kwong | G.Q. Lo
[1] K.-H. Allers,et al. Prediction of dielectric reliability from I-V characteristics: Poole-Frenkel conduction mechanism leading to sqrt(E) model for silicon nitride MIM capacitor , 2004, Microelectron. Reliab..
[2] Sung-Dong Cho,et al. Study on epoxy/BaTiO3 composite embedded capacitor films (ECFs) for organic substrate applications , 2004 .
[3] J. Scarpulla,et al. A TDDB model of Si/sub 3/N/sub 4/-based capacitors in GaAs MMICs , 1999, 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296).
[4] Simon M. Sze,et al. Current Transport and Maximum Dielectric Strength of Silicon Nitride Films , 1967 .
[5] B. El-Kareh,et al. Design of precision capacitors for analog applications , 1992, 1992 Proceedings 42nd Electronic Components & Technology Conference.
[6] R. Ulrich. Embedded resistors and capacitors for organic-based SOP , 2004, IEEE Transactions on Advanced Packaging.
[7] S. Decoutere,et al. Investigation of PECVD dielectrics for nondispersive metal-insulator-metal capacitors , 2002, IEEE Electron Device Letters.
[8] D.S.H. Chan,et al. RF, DC, and reliability characteristics of ALD HfO/sub 2/-Al/sub 2/O/sub 3/ laminate MIM capacitors for Si RF IC applications , 2004, IEEE Transactions on Electron Devices.
[9] N. Balasubramanian,et al. High-performance inductors on plastic substrate , 2005, IEEE Electron Device Letters.
[10] K. Chew,et al. Characterization and comparison of PECVD silicon nitride and silicon oxynitride dielectric for MIM capacitors , 2003, IEEE Electron Device Letters.
[11] William D. Brown,et al. Characterization of thin film tantalum oxide capacitors on polyimide substrates , 1999 .
[12] Rao Tummala,et al. Next generation integral passives: materials, processes, and integration of resistors and capacitors on PWB substrates , 2000 .
[13] Winco K.C. Yung,et al. Embedded components in printed circuit boards: a processing technology review , 2005 .
[14] J. Babcock,et al. Analog characteristics of metal-insulator-metal capacitors using PECVD nitride dielectrics , 2001, IEEE Electron Device Letters.