Two dimensional radiation hydrodynamic simulation for extreme ultra-violet emission from laser-produced tin plasmas

We simulated Extreme Ultra-Violet (EUV) emission from laser-produced tin plasmas for the lithography of semi-conductor, using one- and two- dimensional radiation hydrodynamic simulation codes, and benchmarked the simulations by comparison with recent experiments. We successfully reproduced the measured conversion efficiency, x-ray spectra, plasma density profiles in the experimental conditions. This is the first example of benchmarking the radiation hydrodynamic simulation for the laser-produced tin (Sn) by comprehensive experimental observations. We found self-absorption of radiation due to the large opacity plays an important role in emission. Thus, the photo-excitation is included in our code to reproduce the experimental results.