论文信息 - High Density Plasma Damage Induced in n-GaN Schottky Diodes Using Cl2/Ar Discharges - 字舞流文

High Density Plasma Damage Induced in n-GaN Schottky Diodes Using Cl2/Ar Discharges

A. P. Zhang | F. Ren | S. Pearton | A. Baca | E. Lambers | R. Shul | L. Zhang | G. Dang | H. Cho | R. Hickman | J. V. Hove | Xiaofan Cao