22am2-E6 Prototype of Electromagnetic MEMS Energy Harvester by Using NdFeB Sputter to Si Formed Micro Unevenness
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Yuji Tanaka | Kensuke Kanda | Takayuki Fujita | Kazusuke Maenaka | Kohei Yamaguchi | Koji Sonoda | Noritaka Takehira | K. Yamaguchi | K. Maenaka | T. Fujita | K. Kanda | K. Sonoda | Y. Tanaka | N. Takehira