Analysis and design of transmittance for an antireflective surface microstructure.

In order to easily analyze and design the transmittance characteristics of an antireflective surface called the 'moth-eye structure', the validity of both scalar diffraction theory and effective medium theory is quantitatively evaluated by a comparison of diffraction efficiencies predicted from both simplified theories to exact results calculated by a rigorous electromagnetic theory. The effect of surface microstructure parameters including the normalized period and the normalized depth has been determined at normal incidence. It is found that, in general, when the normalized period is more than four wavelengths of the incident light the scalar diffraction theory is useful within the error of 5%. Besides, the effective medium theory is accurate for evaluating the diffraction efficiency within the error of less than 1% when the higher order diffraction waves other than zero order wave is not to propagate. In addition, the limitation of scalar diffraction method and effective refractive index method is dependent on not only the normalized period of surface profile but also the normalized groove depth.

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