Hardness measurement of CVD diamond coatings on SiC substrates

Abstract Hardness of CVD diamond coatings was determined by CSM™ nanohardness tester (NHT) and Vickers microhardness tester. Nanoindentation measurements were performed with loads from 50 to 300 mN and measured hardness and elastic modulus values were about 105 and 1147 GPa, respectively. These values were compared with the values found from the Vickers microhardness tester. This work justifies the use of the nanoindentation technique over conventional microhardness tests for reliable measurement of hardness of chemical vapour deposited (CVD) diamond coatings as microhardness testing resulted in localised damage precluding accurate measurement.

[1]  J. Field.  The Properties of Diamond , 1979 .

[2]  M. Marinelli,et al.  Comparative study of band-A cathodoluminescence and Raman spectroscopy in CVD diamond films , 1999 .

[3]  David N. Jamieson,et al.  Raman investigation of damage caused by deep ion implantation in diamond , 2000 .

[4]  William D. Nix,et al.  Effects of the substrate on the determination of thin film mechanical properties by nanoindentation , 2002 .

[5]  G. Pharr,et al.  An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments , 1992 .

[6]  Wang Jing,et al.  Mechanical and tribological properties of non-hydrogenated DLC films synthesized by IBAD , 2000 .

[7]  N. Savvides,et al.  Microhardness and Young’s modulus of diamond and diamondlike carbon films , 1992 .

[8]  R. Dauskardt,et al.  Fracture of synthetic diamond , 1995 .

[9]  G. Sandonato,et al.  Characterization of boron doped CVD diamond films by Raman spectroscopy and X-ray diffractometry , 2002 .

[10]  D. Kwon,et al.  Micromechanical estimation of composite hardness using nanoindentation technique for thin-film coated system , 2000 .

[11]  D. Peebles,et al.  Analytical and mechanical evaluation of diamond films on silicon , 1990 .

[12]  M. Laugier.  The elastic/plastic indentation of ceramics , 1985 .

[13]  Robert J.K. Wood,et al.  Nanoindentation of CVD diamond : comparison of an FE model with analytical and experimental data , 2001 .

[14]  F. W. Smith,et al.  Optical properties and microstructure of CVD diamond films , 1997 .

[15]  J. Robertson,et al.  Interpretation of Raman spectra of disordered and amorphous carbon , 2000 .

[16]  David N. Jamieson,et al.  The Raman spectrum of nanocrystalline diamond , 2000 .

[17]  K. E. Spear.  Diamond—Ceramic Coating of the Future , 1989 .

[18]  S. Prawer,et al.  Growth‐sector dependence of fine structure in the first‐order Raman diamond line from large isolated chemical‐vapor‐deposited diamond crystals , 1993 .

[19]  C. V. Cooper,et al.  Ultralow-load indentation hardness and modulus of diamond films deposited by hot-filament-assisted CVD , 1990 .

[20]  R. Kalish,et al.  The chemical nature of the carbon precursor in bias-enhanced nucleation of CVD diamond , 1997 .

[21]  J. Speck,et al.  Fracture toughness of chemically vapor-deposited diamond , 1991 .