Hyper Gaussian windows with fractional wavefronts

For reducing the impact of focus errors on the modulation transfer function (MTF), we explore the use of fractional phase power masks combined with either sub Gaussian windows, or super Gaussian windows. We present a sub Gaussian mask combined, with an asymmetric fractional phase profile, which reduces both the variations of the MTF vs. focus errors and the oscillations of the MTF around its tendency curve. However, this mask also reduces the light throughput by a factor of two.

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