Gas Barrier Performances of Silica Films Deposited on Poly(Ethylene Terephthalate) Substrates by Plasma-Enhanced CVD

Transparent gas barrier silica films were synthesized on poly(ethylene terephthalate) substrates by a low-temperature plasma-enhanced chemical vapor deposition method using an organosilane/oxygen mixture. The gas barrier performances of the films were significantly affected by their structures and chemical compositions. Structural defects, such as grain boundaries, pinholes and cracks, degraded the gas barrier performance, as well as chemical-compositional defects, such as loosely packed siloxane-networks and imperfect siloxane-networks, due to the termination of networks with impurities. An excellent gas barrier performance was attained with a silica film consisting of densely-packed and fully cross-linked siloxane-networks.

[1]  H. Sugimura,et al.  Growth Manner of Silica Film on Polyethylene Terephthalate Substrates in Plasma-Enhanced Chemical Vapor Deposition , 2003 .

[2]  H. Sugimura,et al.  Gas Barrier Performance of Surface-Modified Silica Films with Grafted Organosilane Molecules , 2003 .

[3]  H. Sugimura,et al.  Transparent Silica Films Deposited by Low‐Temperature Plasma‐Enhanced CVD Using Hexamethyldisiloxane , 2002 .

[4]  D. Bergbreiter,et al.  Surface Functionalized Polypropylene: Synthesis, Characterization, and Adhesion Properties , 2001 .

[5]  G. Dennler,et al.  Studies of the earliest stages of plasma-enhanced chemical vapor deposition of SiO2 on polymeric substrates , 2001 .

[6]  †. A. F. Poncin-Epaillard,et al.  Relations between Surface Energy and Surface Potentials of a Nitrogen Plasma-Modified Polypropylene , 2000 .

[7]  R. Noble,et al.  Polyimide-silica composite materials: How does silica influence their microstructure and gas permeation properties? , 1999 .

[8]  Tai-Ju Chen,et al.  Investigation of silicon oxide films prepared by room-temperature ion plating , 1998 .

[9]  S. Maiti,et al.  Surface modification and evaluation of polyethylene film , 1998 .

[10]  N. Harvey,et al.  Activated Rate Theory Treatment of Oxygen and Water Transport through Silicon Oxide/Poly(ethylene terephthalate) Composite Barrier Structures , 1997 .

[11]  T. Mizutani,et al.  Optical properties and structrue of SiO2 films prepared by ion-beam sputtering , 1996 .

[12]  N. Mermilliod,et al.  Improvement of polypropylene film adhesion in multilayers by various chemical surface modifications , 1995 .

[13]  M. Kogoma,et al.  Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane films prepared by atmospheric pressure glow discharge , 1995 .

[14]  R. Singh,et al.  Prediction of oxygen transport parameters of plastic packaging materials from transient state measurements , 1995 .

[15]  J. Theil,et al.  Carbon content of silicon oxide films deposited by room temperature plasma enhanced chemical vapor deposition of hexamethyldisiloxane and oxygen , 1994 .