论文信息 - Defect formation and recrystallization mechanisms in silicon-on-sapphire films under ion irradiation - 字舞流文

Defect formation and recrystallization mechanisms in silicon-on-sapphire films under ion irradiation

V. Chernysh | A. Sidorov | A. Shemukhin | S. Golubkov | N. Egorov | Y. Balakshin

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