INVESTIGATION ON NITROGENATED DLC FILMS FOR ANTI-REFLECTION COATING APPLICATION

Diamond-like carbon (DLC) films were deposited with a RF magnetron sputtering device. The target used was high purity graphite (99.999%) and n-type Si was used as the substrate. In order to get good anti-reflective films nitrogen gas was used to a small extent in addition to hydrogen gas thus resulting in a-C:H:N thin films. From the Ellipsometry studies it was found that the deposited films were good for optical coating. XPS studies indicate that film contains carbon in graphitic form, DLC form and CN bonding in sp2 trigonal and sp3 tetrahedral structure. FT-IR spectra analysis agrees with the results of XPS data. AFM studies show that the surface roughness of the films depend on the film composition.