Process And Device Innovations Based On Ultra Clean Technology

Discusses the process and device innovations that are based on ultra clean technology and applications.

[1]  T. Ohmi.  ULSI reliability through ultraclean processing , 1993, Proc. IEEE.

[2]  Tadashi Shibata,et al.  A low damage, low contaminant plasma processing system utilizing energy clean technology , 1991 .

[3]  Tadashi Shibata,et al.  Real-time reconfigurable logic circuits using neuron MOS transistors , 1993, 1993 IEEE International Solid-State Circuits Conference Digest of Technical Papers.

[4]  T. Ohmi,et al.  Hardware-backpropagation learning of neuron MOS neural networks , 1992, 1992 International Technical Digest on Electron Devices Meeting.

[5]  Tadahiro Ohmi,et al.  Neuron MOS voltage-mode circuit technology for multiple-valued logic , 1993 .

[6]  T. Ohmi,et al.  Neuron-MOS binary-logic circuits featuring dramatic reduction in transistor count and interconnections , 1992, 1992 International Technical Digest on Electron Devices Meeting.

[7]  Tadashi Shibata,et al.  A functional MOS transistor featuring gate-level weighted sum and threshold operations , 1992 .

[8]  Tadashi Shibata,et al.  Neuron MOS binary-logic integrated circuits. I. Design fundamentals and soft-hardware-logic circuit implementation , 1993 .

[9]  Tadahiro Ohmi,et al.  Control of ion energy and flux in a dual radio frequency excitation magnetron sputtering discharge , 1991 .

[10]  Tadahiro Ohmi,et al.  Dual excitation reactive ion etcher for low energy plasma processing , 1992 .

[11]  Tadahiro Ohmi,et al.  An intelligent MOS transistor featuring gate-level weighted sum and threshold operations , 1991, International Electron Devices Meeting 1991 [Technical Digest].

[12]  Tadahiro Ohmi,et al.  A proposed magnetically enhanced reactive ion etcher for ULSI , 1992 .

[13]  Tadashi Shibata,et al.  Minimizing Wafer Surface Damage and Chamber Material Contamination in New Plasma Processing Equipment , 1990 .

[14]  Tadahiro Ohmi,et al.  A self-learning neural-network LSI using neuron MOSFETs , 1992, 1992 Symposium on VLSI Technology Digest of Technical Papers.

[15]  T. Shibata,et al.  An excellent weight-updating-linearity synapse memory cell for self-learning neuron MOS neural networks , 1993, Proceedings of IEEE International Electron Devices Meeting.

[16]  Tadashi Shibata,et al.  Advanced Plasma Processing Equipment without Wafer Surface Damage and Chamber Material Contamination , 1990 .

[17]  Tadahiro Ohmi,et al.  Independent control of ion density and ion bombardment energy in a dual RF excitation plasma , 1993 .

[18]  Tadashi Shibata,et al.  Neuron MOS winner-take-all circuit and its application to associative memory , 1993, 1993 IEEE International Solid-State Circuits Conference Digest of Technical Papers.