CAD modeling of scratch drive actuation

Assembled MEMS structures provide a unique design opportunity by overcoming the inherent planarity of the MEMS fabrication process, allowing for added flexibility and new application areas. However, post-process assembly of these devices is frequently problematic. Force and displacement controls are often imprecise at the microscale resulting in damage to the device. In contrast, self-assembling MEMS structures can avoid external manipulation and therefore can be less likely to suffer damage. Self-assembly, though, requires the added complexity of integrated actuation.