论文信息 - Improved signal-to-noise ratio of silicon microphones by a high-impedance resistor

Improved signal-to-noise ratio of silicon microphones by a high-impedance resistor

This paper presents the improvement of the signal-to-noise ratio of a silicon microphone by utilizing a high-impedance load resistor. A model is described which considers the acoustical and electrical parts of the microphone. Based on an equivalent circuit diagram, the model is able to simulate the sensitivity and the noise thus the signal-to-noise ratio. Describing the noise spectrum differentiated by parts, the thermal noise of the load resistor proves to be a main noise source as long as the resistance is relatively low.

Alfons Dehe | Marc Füldner | R. Laur | M. Brauer | Stefan Barzen

[1] R. Aigner,et al. Silicon microphone based on surface and bulk micromachining , 2001 .

[2] Wouter Olthuis,et al. An integrated silicon capacitive microphone with frequency-modulated digital output , 1998 .

[3] Ole Hansen,et al. Design Of A Silicon Microphone With Differential Read-out Of A Sealed Double Parallel-plate Capacitor , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.