Spot-size converter with a SiO(2) spacer layer between tapered Si and SiON waveguides for fiber-to-chip coupling.

We experimentally demonstrate low-loss and polarization-insensitive fiber-to-chip coupling spot-size converters (SSCs) comprised of a three dimensionally tapered Si wire waveguide, a SiON secondary waveguide, and a SiO(2) spacer inserted between them. Fabricated SSCs with the SiO(2) spacer exhibit fiber-to-chip coupling loss of 1.5 dB/facet for both the quasi-TE and TM modes and a small wavelength dependence in the C- and L-band regions. The SiON secondary waveguide is present only around the SSC region, which significantly suppresses the influence of the well-known N-H absorption of plasma-deposited SiON at around 1510 nm.

[1]  Jiho Joo,et al.  A fiber-to-chip coupler based on Si/SiON cascaded tapers for Si photonic chips. , 2013, Optics express.

[2]  Y. Arakawa,et al.  A Hybrid Integrated Light Source on a Silicon Platform Using a Trident Spot-Size Converter , 2014, Journal of Lightwave Technology.

[3]  K. Yvind,et al.  Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide , 2010 .

[4]  Ultranarrow Silicon Inverse Taper Waveguide Fabricated with Double-Patterning Photolithography for Low-Loss Spot-Size Converter , 2012 .

[5]  T Pinguet,et al.  A Grating-Coupler-Enabled CMOS Photonics Platform , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[6]  T. Shoji,et al.  Microphotonics devices based on silicon microfabrication technology , 2005, IEEE Journal of Selected Topics in Quantum Electronics.

[7]  A. Boltasseva,et al.  Directional Couplers Using Long-Range Surface Plasmon Polariton Waveguides , 2006, IEEE Journal of Selected Topics in Quantum Electronics.

[8]  F. Horst,et al.  Silicon Oxynitride Layers for Optical Waveguide Applications , 2000 .

[9]  G. Roelkens,et al.  Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography , 2005, IEEE Photonics Technology Letters.

[10]  T. Enoki,et al.  Characteristics of organic film deposited by plasma-enhanced chemical-vapor deposition using a benzocyclobutene resin , 2004 .

[11]  M. Lipson,et al.  Nanotaper for compact mode conversion. , 2003, Optics letters.

[12]  Emiko Omoda,et al.  Silicon knife-edge taper waveguide for ultralow-loss spot-size converter fabricated by photolithography , 2013 .

[13]  K. Worhoff,et al.  Design, tolerance analysis, and fabrication of silicon oxynitride based planar optical waveguides for communication devices , 1999 .

[14]  T. Tsuchizawa,et al.  Low loss mode size converter from 0.3 /spl mu/m square Si wire waveguides to singlemode fibres , 2002 .

[15]  Benjamin G Lee,et al.  Multichannel High-Bandwidth Coupling of Ultradense Silicon Photonic Waveguide Array to Standard-Pitch Fiber Array , 2011, Journal of Lightwave Technology.