Indium channel implant for improved short-channel behavior of submicrometer NMOSFETs
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B. Davari | B. Clark | P. Coane | B. Davari | G. Shahidi | C. Blair | T. Bucelot | P. Ronsheim | G.G. Shahidi | T.J. Bucelot | P.A. Ronsheim | P.J. Coane | S. Pollack | C.R. Blair | H.H. Hansen | S. Pollack | B. Clark | H. Hansen
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