Imaging confocal microscopy

Imaging confocal microscopy is a well-known technology for the 3D measurement of surface topography. A confocal microscope is used for the acquisition of a sequence of confocal images through the depth of focus of the objective. The highest signal within the images of the sequence for each pixel correlates with the height position of the topography. Confocal microscopy has many advantages over other optical techniques such as having a high numerical aperture, meaning a high lateral resolution and a high measurable local slope. The field of applications is very broad, from semiconductor, materials, paper, energy, biomedical, optics, flat panel displays, and more.

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