论文信息 - Influence of dry etching on the properties of SiO2 and HfO2 single layers. - 字舞流文

Influence of dry etching on the properties of SiO2 and HfO2 single layers.

Hongfei Jiao | Xinbin Cheng | Jinlong Zhang | Zhanshan Wang | Jun Zhao | Hua-song Liu | Lingyun Xie