论文信息 - Synthesis of SiC Microstructures in Si Technology by High Dose Carbon Implantation: Etch‐Stop Properties - 字舞流文

Synthesis of SiC Microstructures in Si Technology by High Dose Carbon Implantation: Etch‐Stop Properties

A. Romano-Rodríguez | A. Pérez‐Rodríguez | L. Calvo‐Barrio | J. Morante | C. Serre | W. Skorupa | R. Kögler | M. Acero | J. Esteve