Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction
暂无分享,去创建一个
Núria Barniol | Francesc Pérez-Murano | Marc Sansa | Arantxa Uranga | Eloi Marigó | A. Uranga | N. Barniol | F. Pérez-Murano | E. Marigó | M. Sansa
[1] G. Abadal,et al. Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range , 2008, IEEE Electron Device Letters.
[2] M. Roukes,et al. Gas sensors based on gravimetric detection—A review , 2011 .
[3] M. Roukes,et al. VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors , 2011, 2011 International Electron Devices Meeting.
[4] J. Lahann,et al. Fully monolithic CMOS nickel micromechanical resonator oscillator , 2008, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
[5] J.T.M. van Beek,et al. A 10MHz piezoresistive MEMS resonator with high Q , 2006, 2006 IEEE International Frequency Control Symposium and Exposition.
[6] G. Abadal,et al. Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies , 2009 .
[7] G.K. Fedder,et al. On-Chip High Quality Factor CMOS-MEMS Silicon-Fin Resonators , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
[8] J. Richter,et al. Piezoresistive effect in top-down fabricated silicon nanowires , 2008, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
[9] Chi-Hang Chin,et al. Capacitively-driven and piezoresistively-sensed CMOS-MEMS resonators , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).
[10] Jordi Llobet,et al. High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators , 2014, Nature Communications.
[11] J. L. Muñoz-Gamarra,et al. Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories , 2013 .
[12] M. Roukes,et al. Single-protein nanomechanical mass spectrometry in real time , 2012, Nature nanotechnology.
[13] Joshua E.-Y. Lee,et al. Parasitic feedthrough cancellation techniques for enhanced electrical characterization of electrostatic microresonators , 2009 .
[14] Peidong Yang,et al. Self-transducing silicon nanowire electromechanical systems at room temperature. , 2008, Nano letters.
[15] A. Bachtold,et al. Ultrasensitive mass sensing with a nanotube electromechanical resonator. , 2008, Nano letters.
[16] Weileun Fang,et al. A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits , 2011 .
[17] Weileun Fang,et al. VHF CMOS-MEMS oxide resonators with Q > 10,000 , 2012, 2012 IEEE International Frequency Control Symposium Proceedings.
[18] A. Boisen,et al. Cantilever-like micromechanical sensors , 2011 .
[19] J.T.M. van Beek,et al. Scalable 1.1 GHz fundamental mode piezo-resistive silicon MEMS resonator , 2007, 2007 IEEE International Electron Devices Meeting.
[20] Robert Puers,et al. A review of MEMS oscillators for frequency reference and timing applications , 2011 .
[21] Wenzhe Zhou,et al. CMOS-Integrated RF MEMS Resonators , 2010, Journal of Microelectromechanical Systems.
[22] M. Roukes,et al. Large-scale integration of nanoelectromechanical systems for gas sensing applications. , 2012, Nano letters.
[23] M. Roukes,et al. Comparative advantages of mechanical biosensors. , 2011, Nature nanotechnology.