Effect of Ultrasonic Vibration on Micro Grooving

This paper deals with the micro cutting method to fulfill the current demand for higher precision and efficiency in micro machining. In this work, a micro end mill with a diameter of 20 μm is fabricated and its performance is evaluated in grooving under the condition of with or without ultrasonic vibration assistance. Here, the machining characteristic is clarified and further its machining mechanism is also considered. Experimental results showed that micro grooving conducted with the assistance of ultrasonic vibration proven to be an effective method for burr removal.