Polarization-shifting method for step interferometry

A phase step interferometry system using polarization shifting is described. The device is essentially a Mach-Zehnder interferometer in which the polarization of light travelling through one arm is orthogonal to the polarization of light travelling through the other arm. At the interferometer output we place a quarter-wave plate with its fast axis at with respect to the polarization directions and a polarizer. By rotating the polarizer, the interfering waves acquire an extra phase (of topological origin) to that expected from the calculations of optical path lengths, and thus, arbitrary phase shifts can be induced. Then, from a set of interferograms recorded while the reference phase is changed, the `dynamical' phase difference (e.g. the phase profile of an object placed in one of the interferometer arms) can be reconstructed by using techniques of phase-shifting interferometry.

[1]  J. Schwider,et al.  Digital wave-front measuring interferometry: some systematic error sources. , 1983, Applied optics.

[2]  C. J. Morgan.  Least-squares estimation in phase-measurement interferometry. , 1982, Optics letters.

[3]  K. Creath.  V Phase-Measurement Interferometry Techniques , 1988 .

[4]  C M Vest,et al.  Interferometry of strongly refracting axisymmetric phase objects. , 1975, Applied optics.

[5]  M. Berry.  The Adiabatic Phase and Pancharatnam's Phase for Polarized Light , 1987 .

[6]  M. Berry.  Quantal phase factors accompanying adiabatic changes , 1984, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences.

[7]  C Joenathan,et al.  Phase-measuring interferometry: new methods and error analysis. , 1994, Applied optics.

[8]  Michael A. Player,et al.  Phase step measurement and variable step algorithms in phase-shifting interferometry , 1992 .

[9]  K Creath,et al.  Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry. , 1995, Applied optics.

[10]  D. Malacara.  Optical Shop Testing , 1978 .

[11]  Maitreyee Roy,et al.  White-light Phase-stepping Interferometry: Measurement of the Fractional Interference Order , 1995 .

[12]  K A Nugent,et al.  Abel inversion using fast Fourier transforms. , 1988, Applied optics.

[13]  K Murata,et al.  Digital phase-measuring interferometry with a tunable laser diode. , 1987, Optics letters.

[14]  Y Surrel,et al.  Design of algorithms for phase measurements by the use of phase stepping. , 1996, Applied optics.

[15]  P. Hariharan,et al.  White-light Phase-stepping Interferometry for Surface Profiling , 1994 .

[16]  Nai-Keng Bao,et al.  Applications of a novel phase-shift method using a computer-controlled polarization mechanism , 1994 .

[17]  Application of geometric phase techniques to stellar interferometry. , 1996, Applied optics.

[18]  H Z Hu,et al.  Polarization heterodyne interferometry using a simple rotating analyzer. 1: Theory and error analysis. , 1983, Applied optics.

[19]  T. Yatagai,et al.  Generalized phase-shifting interferometry , 1991 .