A fully microfabricated two-dimensional electrospray array with applications to space propulsion

Author . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Department of Electrical Engineering and Computer Science May 23rd, 2007 Certified by. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Manuel Mart́ınez-Sánchez Professor of Aeronautics and Astronautics Thesis Supervisor

[1]  Paulo Lozano,et al.  Studies on the Ion-Droplet Mixed Regime in Colloid Thrusters , 2003 .

[2]  Séverine Le Gac,et al.  A planar on-chip micro-nib interface for NanoESI–MS microfluidic applications , 2004 .

[3]  Younan Xia,et al.  Electrospinning of Nanofibers: Reinventing the Wheel? , 2004 .

[4]  Katharine Smith,et al.  Electrospray Performance of Microfabricated Colloid Thruster Arrays , 2006 .

[5]  Alexander H. Slocum,et al.  Design of three-groove kinematic couplings , 1992 .

[6]  J. Raskin,et al.  Low-temperature wafer bonding: a study of void formation and influence on bonding strength , 2005, Journal of Microelectromechanical Systems.

[7]  S. Edward Law,et al.  Agricultural electrostatic spray application: a review of significant research and development during the 20th century , 2001 .

[8]  J. F. D. L. Mora,et al.  Taylor cones of ionic liquids from capillary tubes as sources of pure ions for electrical propulsion , 2006 .

[9]  M. Martinez-Sanchez,et al.  A Micro-Fabricated Linear Array of Electrospray Emitters for Thruster Applications , 2006, Journal of Microelectromechanical Systems.

[10]  S. M. Spearing,et al.  Fabrication of wafer-level thermocompression bonds , 2002 .

[11]  Dale J. Levandier,et al.  Analysis of the Electrospray Plume from the EMI-Im Propellant Externally Wetted on a Tungsten Needle , 2006 .

[12]  P. D. Prewett,et al.  Focused ion beams from liquid metal ion sources , 1991 .

[13]  D. Knapp,et al.  Miniaturized multichannel electrospray ionization emitters on poly(dimethylsiloxane) microfluidic devices , 2001, Electrophoresis.

[14]  K. Okuyama,et al.  Preparation of ZnS Nanoparticles by Electrospray Pyrolysis , 2000 .

[15]  Corso,et al.  A fully integrated monolithic microchip electrospray device for mass spectrometry , 2000, Analytical chemistry.

[16]  S. Senturia Microsystem Design , 2000 .

[17]  P. Prewett,et al.  The dynamics of liquid metal ion sources , 1984 .

[18]  J. V. Iribarne,et al.  On the evaporation of small ions from charged droplets , 1976 .

[19]  Paulo Lozano,et al.  Energy properties of an EMI-Im ionic liquid ion source , 2006 .

[20]  Stefan Bengtsson,et al.  Formation of Silicon Structures by Plasma‐Activated Wafer Bonding , 2000 .

[21]  Peter C. Norgaard,et al.  The NASA GSFC MEMS Colloidal Thruster , 2004 .

[22]  T. Laurell,et al.  Tailoring of Porous Silicon Morphology in Chip Integrated Bioreactors , 2000 .

[23]  A. I. Akinwande,et al.  Mechanical Assembly of Electrospray Thruster Grid , 2005 .

[24]  John Zeleny,et al.  The Electrical Discharge from Liquid Points, and a Hydrostatic Method of Measuring the Electric Intensity at Their Surfaces , 1914 .

[25]  Shu-Hui Chen,et al.  Chip‐based microfluidic devices coupled with electrospray ionization‐mass spectrometry , 2005, Electrophoresis.

[26]  S. Gabriel,et al.  A micro-fabricated colloidal thruster array , 2001 .

[27]  N. C. MacDonald,et al.  DESIGN, FABRICATION, AND CHARACTERIZATION OF SINGLE CRYSTAL SILICON LATCHINGSNAP FASTENERS FOR MICRO ASSEMBLY , 1995 .

[28]  Jijun Xiong,et al.  Investigation of the onset voltage for the design of a microfabricated colloid thruster , 2006 .

[29]  Luis Fernando,et al.  The design, fabrication and testing of micro-fabricated linear and planar colloid thruster arrays , 2004 .

[30]  Paulo Lozano,et al.  Ionic liquid ion sources: characterization of externally wetted emitters. , 2005, Journal of colloid and interface science.

[31]  P. W. Kidd,et al.  Life test /4350 hours/ of an advanced colloid thruster module , 1973 .

[32]  Geoffrey Ingram Taylor,et al.  Disintegration of water drops in an electric field , 1964, Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences.

[33]  Göran Stemme,et al.  Development of micromachined hollow tips for protein analysis based on nanoelectrospray ionization mass spectrometry , 2002 .

[34]  P. Danielsson Euclidean distance mapping , 1980 .

[35]  Jean-Pierre Raskin,et al.  Low-temperature wafer bonding optimal O-2 plasma surface pretreatment time , 2004 .

[36]  R. J. Archer Stain films on silicon , 1960 .

[37]  Manuel Martinez-Sanchez,et al.  On the dynamic response of externally wetted ionic liquid ion sources , 2005 .

[38]  J. Mora,et al.  The effect of charge emission from electrified liquid cones , 1992, Journal of Fluid Mechanics.

[39]  Michael L. Simpson,et al.  Self-aligned gated field emission devices using single carbon nanofiber cathodes , 2002 .

[40]  M. Wilm,et al.  Electrospray and Taylor-Cone theory, Dole's beam of macromolecules at last? , 1994 .

[41]  Alan G. R. Evans,et al.  Realisation of very high voltage electrode-nozzle systems for MEMS , 2004 .

[42]  Joan Fuller,et al.  The room temperature ionic liquid 1-ethyl-3-methylimidazolium tetrafluoroborate : Electrochemical couples and physical properties , 1997 .

[43]  Miko Elwenspoek,et al.  The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control , 1995 .

[44]  G. J. Maclay,et al.  Preparation and characterization of platinum black electrodes , 2000 .

[45]  M. L. Reed,et al.  Micromechanical Velcro , 1992 .

[46]  Manuel Gamero-Castaño,et al.  A torsional balance for the characterization of microNewton thrusters , 2003 .

[47]  M. Mann,et al.  Electrospray Ionization for Mass Spectrometry of Large Biomolecules , 1990 .

[48]  G. Sorensen,et al.  Electrostatic spraying:  a novel technique for preparation of polymer coatings on electrodes. , 1996, Analytical chemistry.

[49]  R D Smith,et al.  Generation of multiple electrosprays using microfabricated emitter arrays for improved mass spectrometric sensitivity. , 2001, Analytical chemistry.

[50]  V. Starkov,et al.  Porous-Silicon Formation in HF–HNO3–H2O Etchants , 2002 .

[51]  K. Najafi,et al.  Characterization of low-temperature wafer bonding using thin-film parylene , 2005, Journal of Microelectromechanical Systems.

[52]  Erno Nagy The Ion Rocket , 1961 .

[53]  K. Horch,et al.  A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array , 1991, IEEE Transactions on Biomedical Engineering.

[54]  I. Lazar,et al.  Microfabricated devices: A new sample introduction approach to mass spectrometry. , 2006, Mass spectrometry reviews.

[55]  Manuel Gamero-Castaño,et al.  Electrospray as a source of nanoparticles for efficient colloid thrusters , 2000 .

[56]  Vadim Khayms,et al.  Advanced propulsion for microsatellites , 2000 .

[57]  K. Pister,et al.  Out of plane motion of assembled microstructures using a single-mask SOI process , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[58]  Louis A. Romero,et al.  Flow in an open channel capillary , 1996, Journal of Fluid Mechanics.

[59]  S. Quake,et al.  Microfluidics: Fluid physics at the nanoliter scale , 2005 .

[60]  Ron Jenkins,et al.  Quantitative X-Ray Spectrometry , 1981 .

[61]  Stain etching of silicon pillars and macropores , 2005 .

[62]  P. Lozano,et al.  Propellant Spread over Silicon Electrospray Surfaces , 2006 .

[63]  M. Martinez-Sanchez,et al.  A Planar Array of Micro-Fabricated Electrospray Emitters for Thruster Applications , 2006, Journal of Microelectromechanical Systems.

[64]  Mohan Edirisinghe,et al.  Controlled deposition of nanoparticle clusters by electrohydrodynamic atomization , 2004 .

[65]  V. Starov,et al.  Spreading of liquid drops over dry porous layers: complete wetting case. , 2002, Journal of colloid and interface science.

[66]  Robbins,et al.  Simulations of contact-line motion: Slip and the dynamic contact angle. , 1989, Physical review letters.

[67]  Paulo Lozano,et al.  Ionic liquid ion sources: suppression of electrochemical reactions using voltage alternation. , 2004, Journal of colloid and interface science.

[68]  Robert S. Legge,et al.  Fabrication and Characterization of Porous Metal Emitters for Electrospray Thrusters , 2007 .

[69]  Mark A. Reed,et al.  Liquid fuel microcombustor using microfabricated multiplexed electrospray sources , 2007 .

[70]  Uwe Thiele,et al.  Wetting of textured surfaces , 2002 .

[71]  G. Mair Theoretical determination of current-voltage curves for liquid metal ion sources , 1984 .

[72]  The electrospray and combustion at the mesoscale , 2003 .

[73]  Mariano Andrenucci,et al.  Experimental Performance of Field Emission Microthrusters , 1998 .

[74]  S. Spearing,et al.  Controlling and Testing the Fracture Strength of Silicon on the Mesoscale , 2000 .

[75]  Nikolai Dechev,et al.  Mechanical Fastener Designs for Use in the Microassembly of 3D Microstructures , 2004 .

[76]  A. G. Bailey Temperature Effects and Capillarity in an Electrostatic Liquid Thruster , 1975 .

[77]  Mark A. Reed,et al.  Increase of electrospray throughput using multiplexed microfabricated sources for the scalable generation of monodisperse droplets , 2006 .

[78]  M. Wilm,et al.  Analytical properties of the nanoelectrospray ion source. , 1996, Analytical chemistry.

[79]  David Jacqmin,et al.  Contact-line dynamics of a diffuse fluid interface , 2000, Journal of Fluid Mechanics.

[80]  H. C. Miller Surface flashover of insulators , 1988 .

[81]  Arthur Y. Yahiku,et al.  Research and development of a charged-particle bipolar thruster. , 1969 .

[82]  R. Winand Electrocrystallization: theory and applications , 1992 .

[83]  Carretero Benignos,et al.  Numerical simulation of a single emitter colloid thruster in pure droplet cone-jet mode , 2005 .

[84]  Daniel L. Flamm,et al.  Mechanisms of silicon etching in fluorine- and chlorine-containing plasmas , 1990 .

[85]  Manuel Gamero-Castaño,et al.  Source of heavy molecular ions based on Taylor cones of ionic liquids operating in the pure ion evaporation regime , 2003 .

[86]  Zhaoying Zhou,et al.  Development of a MEMS based colloid thruster with sandwich structure , 2005 .

[87]  J Shul,et al.  Handbook of Advanced Plasma Processing Techniques , 2000 .

[88]  Manuel Martinez-Sanchez,et al.  EXPERIMENTAL MEASUREMENTS OF COLLOID THRUSTER PLUMES IN THE ION-DROPLET MIXED REGIME , 2002 .

[89]  R. McCormick,et al.  Colloid thrusters for the new millennium, ST7 DRS mission , 2004, 2004 IEEE Aerospace Conference Proceedings (IEEE Cat. No.04TH8720).

[90]  D. F. Moore,et al.  Silicon nitride microclips for the kinematic location of optic fibres in silicon V-shaped grooves , 1998 .

[91]  C. M. Waits,et al.  Scalable Electrospray Components for Portable Power Applications Using MEMS Fabrication Techniques , 2006 .

[92]  Stefan Bengtsson,et al.  Plasma assisted room temperature bonding for MST , 2001 .

[93]  W. Steiger,et al.  Indium Field Emission Electric Propulsion Microthruster Experimental Characterization , 2004 .

[94]  Shawn Walker,et al.  Modeling the fluid dynamics of electrowetting on dielectric (EWOD) , 2004, Journal of Microelectromechanical Systems.

[95]  J. Thornton High Rate Thick Film Growth , 1977 .

[96]  P. Lozano,et al.  Capillary vs. externally wetted ionic liquid ion sources , 2006 .

[97]  Y. Tai,et al.  A micromachined chip-based electrospray source for mass spectrometry. , 2000, Analytical chemistry.