Bias Superposition — An On-Line Test Strategy for a MEMS Based Conductivity Sensor
暂无分享,去创建一个
A novel on-line monitoring technique for a range of MEMS and integrated sensor systems is presented based on the injection of a test stimuli into the bias structure of transducer functions. The technique "Bias Superposition" utilises both signal injection and signal extraction techniques to achieve an indication of structural integrity of the transducer and interface. The technique has been successfully applied to a thick film conductance sensor.
[1] P. Hauptmann. Sensors: A Comprehensive Survey , 1996 .
[2] P. R. Bevington,et al. Data Reduction and Error Analysis for the Physical Sciences , 1969 .
[3] Bozena Kaminska,et al. Oscillation built-in self test (OBIST) scheme for functional and structural testing of analog and mixed-signal integrated circuits , 1997, Proceedings International Test Conference 1997.
[4] H. Bau,et al. Sensors: A Comprehensive Survey , 1996 .