Characterisation of ALCVD Al2O3–ZrO2 nanolaminates, link between electrical and structural properties
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M. Caymax | T. Conard | W. Vandervorst | R. Carter | S. Gendt | M. Tuominen | E. Young | W. Besling | M. Heyns | S. Haukka | Chao Zhao | J. Maes | W Besling