Structured light concepts for ultrafast production of micro-optical components

Ultrashort pulsed lasers represent unique tools for the processing of micro-optical components. Pulse durations around 1 ps and corresponding extreme peak intensities lead to interaction processes with all conceivable materials. As parts of almost every optoelectronic device, transparent materials represent a particularly challenging example for processing. Here, a controlled energy deposition at the surface or inside the volume is required while maintaining optical properties or implemented functionalities of adjacent areas. The talk will review strategies for the micro-processing of transparent materials that become possible by spatiotemporal beam shaping. Here, the beneficial use of non-diffracting beams is discussed as well as 3D-beam splitting approaches.

[1]  Daniel Flamm,et al.  Throughput scaling by spatial beam shaping and dynamic focusing , 2017, LASE.

[2]  A. Couairon,et al.  Femtosecond filamentation in transparent media , 2007 .

[3]  Andreas Tünnermann,et al.  Toward laser welding of glasses without optical contacting , 2015 .

[4]  A. Tünnermann,et al.  Spatio-temporal analysis of glass volume processing using ultrashort laser pulses. , 2018, Applied optics.

[5]  Leimin Deng,et al.  Picosecond laser seal welding of glasses with a large gap. , 2019, Optics express.

[6]  Matthias Domke,et al.  Time-resolved study of femtosecond laser induced micro-modifications inside transparent brittle materials , 2016, SPIE LASE.

[7]  P. A. Atanasov,et al.  Ablation of metals by ultrashort laser pulses , 2004 .

[8]  Daniel Flamm,et al.  Beam shaping for ultrafast materials processing , 2019, LASE.

[9]  Masaaki Sakakura,et al.  Suppression of stress and crack generation in local glass melting by picosecond laser irradiation at a high repetition rates with temporal energy modulation , 2017 .

[10]  Klaus Bergner,et al.  Comparison of different processes for separation of glass and crystals using ultrashort pulsed lasers , 2014, Photonics West - Lasers and Applications in Science and Engineering.

[11]  Andreas Tünnermann,et al.  Ultrashort Pulse Laser Welding - A New Approach for High- Stability Bonding of Different Glasses , 2012 .

[12]  Andreas Tünnermann,et al.  Time-resolved tomography of ultrafast laser-matter interaction. , 2018, Optics express.

[13]  Benjamin A. Rockwell,et al.  Theory and simulation on the threshold of water breakdown induced by focused ultrashort laser pulses , 1997 .

[14]  F. Courvoisier,et al.  Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams. , 2017, Optics letters.

[15]  K. Dholakia,et al.  Bessel beams: Diffraction in a new light , 2005 .

[16]  Lin Li,et al.  Laser glass cutting techniques—A review , 2013 .

[17]  J. Nishii,et al.  Welding of Transparent Materials Using Femtosecond Laser Pulses , 2005 .

[18]  Daniel Flamm,et al.  Multi Pulse Pump-Probe Diagnostics for Development of Advanced Transparent Materials Processing , 2018, Journal of Laser Micro/Nanoengineering.

[19]  Isamu Miyamoto,et al.  Gap bridging in joining of glass using ultra short laser pulses. , 2015, Optics express.

[20]  Gediminas Račiukaitis,et al.  Aberration-controlled Bessel beam processing of glass. , 2018, Optics express.

[21]  S. Nolte,et al.  Lasers in Manufacturing Conference 2015 Tuning the Energy Deposition of Ultrashort Pulses inside Transparent Materials for Laser Cutting Applications , 2015 .

[22]  Tsuyoshi Murata,et al.  {m , 1934, ACML.

[23]  Elke Kaiser,et al.  Laser Welding of Glass Replaces Glueing Procedure , 2016 .

[24]  J. Kleiner,et al.  In Situ Diagnostic for Multi Pulse Processing of Transparent Materials , 2019, 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC).

[25]  Miceli,et al.  Diffraction-free beams. , 1987, Physical review letters.

[26]  Ruslan Vasilyeu,et al.  Generating superpositions of higher-order Bessel beams. , 2009, Optics express.

[27]  Jonathan Leach,et al.  Generation of achromatic Bessel beams using a compensated spatial light modulator. , 2006, Optics express.

[28]  Daniel Flamm,et al.  Facilitated glass separation by asymmetric Bessel-like beams. , 2020, Optics express.

[29]  Daniel Flamm,et al.  High Power and High Energy Ultrafast Disk Lasers for Industrial Applications , 2019, 2019 Conference on Lasers and Electro-Optics (CLEO).

[30]  Daniel Flamm,et al.  Selective etching of ultrafast laser modified sapphire , 2019, LASE.

[31]  J. Gottmann,et al.  Selective, Laser-Induced Etching of Fused Silica at High Scan-Speeds Using KOH , 2014 .

[32]  J. Gottmann,et al.  Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching , 2008, 2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science.

[33]  Daniel Flamm,et al.  High-quality tailored-edge cleaving using aberration-corrected Bessel-like beams. , 2018, Optics letters.

[34]  Martin Reininghaus,et al.  Transverse pump-probe microscopy of moving breakdown, filamentation and self-organized absorption in alkali aluminosilicate glass using ultrashort pulse laser. , 2016, Optics express.

[35]  E. Mazur,et al.  Ultrafast-laser driven micro-explosions in transparent materials , 1997 .

[36]  Daniel Flamm,et al.  Generalized axicon-based generation of nondiffracting beams. , 2019, 1911.03103.