Multitude of glass surface roughness morphologies as a tool box for dosed optical scattering.

Glass surface roughness can be considered positive for certain applications in optics. Results of maskless (i.e., lithography-free) reactive-ion-etch runs are given, where (depending on etch parameters) self-masking leads to very different surface morphologies. The latter's variety allows for virtually any desired scattered visible light power portion, a result that we term dosed scattering. The surfaces are characterized, for example, by the root-mean-square roughness delta(rms), while their optical scattering is described by the diffuse transmission as well as the Harvey parameters. Since the wavelengths lambda in glass are around delta(rms), the shapes of the individual scatterers account for local refraction adding up to the usual scattering.

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