A hybrid probe-tip calibration for multiport vector network analyzers

This paper details the first commercial implementation [1] of a hybrid multiport vector network analyzer (VNA) calibration method suited to a probing environment. The new calibration method implements the enhanced Line-Reflect-Reflect-Match with automatic determination of load inductance [2]-[5] for a number of straight thru paths to fully determine all directivity, reflection tracking, and source and load match terms as well as the associated transmission tracking terms. The remaining transmission tracking terms are found from the use of an unknown but reciprocal thru structure using a process similar to that of the SOLR [6]-[7] calibration algorithm. Combining the LRRM and SOLR algorithms creates a robust, hybrid calibration method that is insensitive to the normal variation in one-port standard behavior associated with normal probe-placement variability [8]-[9]. The hybrid calibration is also insensitive to the inherently non-ideal thru behavior of coplanar waveguide bends or loop-back structures [10].

[1]  Keith Jones,et al.  LRM and LRRM Calibrations with Automatic Determination of Load Inductance , 1990, 36th ARFTG Conference Digest.

[2]  S. Basu,et al.  An SOLR calibration for accurate measurement of orthogonal on-wafer DUTs , 1997, 1997 IEEE MTT-S International Microwave Symposium Digest.

[3]  E. Strid,et al.  A probe technology for 110+ ghz integrated circuits with aluminum pads , 2002, 59th ARFTG Conference Digest, Spring 2002..

[4]  A. Ferrero,et al.  Two-port network analyzer calibration using an unknown 'thru' , 1992, IEEE Microwave and Guided Wave Letters.

[5]  Roger B. Marks,et al.  Comparison of On-Wafer Calibrations , 1991, 38th ARFTG Conference Digest.

[6]  Andreas Weisshaar,et al.  Mode Coupling in Coplanar Waveguide Bends: A Simple Four-Port Model , 2003, 2003 33rd European Microwave Conference, 2003.

[7]  L. Hayden,et al.  An enhanced Line-Reflect-Reflect-Match calibration , 2006, 2006 67th ARFTG Conference.

[8]  Roger B. Marks Multi-Line Calibration for MMIC Measurement , 1990, 36th ARFTG Conference Digest.

[9]  A.M.E. Safwat,et al.  Sensitivity analysis of calibration standards for fixed probe spacing on-wafer calibration techniques [vector network analyzers] , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[10]  A. Safwat,et al.  Sensitivity Analysis of Calibration Standards for SOLT and LRRM , 2001, 58th ARFTG Conference Digest.

[11]  Roger B. Marks,et al.  Formulations of the Basic Vector Network Analyzer Error Model including Switch-Terms , 1997, 50th ARFTG Conference Digest.

[12]  T. Zwick,et al.  Pure-mode network analyzer concept for on-wafer measurements of differential circuits at millimeter-wave frequencies , 2005, IEEE Transactions on Microwave Theory and Techniques.

[13]  J.A. Jargon,et al.  Multiline TRL revealed , 2002, 60th ARFTG Conference Digest, Fall 2002..

[14]  W. R. Eisenstadt,et al.  Calibration and verification of the pure-mode vector network analyzer , 1998 .

[15]  W. R. Eisenstadt,et al.  Microwave differential circuit design using mixed-mode S-parameters , 2006 .

[16]  D. Zelinka,et al.  A Comparative Study of TOSL, TRL, and TRL* Network Analyzer Calibration Techniques, Using Microstrip Test Fixtures , 1995, 46th ARFTG Conference Digest.

[17]  Roger B. Marks,et al.  Two-Tier Multiline TRL for Calibration of Low-Cost Network Analyzers , 1995, 46th ARFTG Conference Digest.

[18]  Roger B. Marks,et al.  Calibration Comparison Method for Vector Network Analyzers , 1996, 48th ARFTG Conference Digest.

[19]  E. Paleczny,et al.  Multimode TRL. A new concept in microwave measurements: theory and experimental verification , 1998 .