A Decoupled Microelectromechanical Resonant Gyroscope

This paper introduces a new decoupled micromachined gyroscope. It is based on resonant sensing of the Coriolis force, which has many advantages over rate gyroscopes that utilize displacement sensing for rotation rate measurement. These advantages include a quasi-digital FM (frequency modulation) output, high resolution, good linearity, and low noise. As a whole, the structure includes two proof masses, cantilevers, leverage mechanisms, DETF (double-ended tuning fork), driving and checking combs. The mechanical and model analyses of structure are carried out by ANSYS. At first, we have done the modal analysis in order to make sure the first modality of the structure is the working modality. At the same time, we change some parameters to let the frequencies of other interference modalities much higher than that of the working modality. Then, the harmonic analysis is made to get the information of the sensitivity of the structure. Verified from the simulation results, the sensor can successfully realize the purpose of decoupling.