论文信息 - The location, evolution, and role of fluorine in glow discharge a-Si:F - 字舞流文

The location, evolution, and role of fluorine in glow discharge a-Si:F

R. Weil | M. Janai | B. Pratt

[1] R. Kalish,et al. Determination of the fluorine concentration in silicon films grown from the disproportionation of SiF2 , 1982 .