Picosecond and subpicosecond visible laser ablation of optically transparent polymers

Abstract The ablation rates, as a function of the laser fluence, of the optically transparent polymers, Nylon-6,6 and PMMA, are reported using picosecond and subpicosecond laser pulses, obtained from a Regenerative Amplified Nd:YAG laser system. The laser pulses had a duration of 100 ps at 1064 and 532 nm wavelengths and 0.8 ps at 595 nm. The ablation rate results indicate a strong saturation behaviour for both polymers in the investigated irradiation conditions. The material removal is 2–3 times higher in the case of the visible (532 nm) picosecond laser ablation experiments. The surface topology of the polymers was also studied. The obtained Atomic Force Microscopy images reveal no mechanical damage in the inner ablation crater wall. The qualitative analysis of the ablation mechanism for ultrashort pulse laser irradiation reveals a combination of photochemically induced direct bond dissociation and a photothermal process due to the relaxation of the excited polymers within the vibrational levels of the ground state.

[1]  D. Bäuerle,et al.  UV-laser-induced surface topology changes in polyimide , 1996 .

[2]  M. Stuke,et al.  Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses , 1989 .

[3]  Bodil Braren,et al.  Ablation and etching of polymethylmethacrylate by very short (160 fs) ultraviolet (308 nm) laser pulses , 1987 .

[4]  M. Stuke,et al.  Femtosecond uv excimer laser ablation , 1987 .

[5]  M. Späth,et al.  Time resolved dynamics of subpicosecond laser ablation. , 1993 .

[6]  K. Midorikawa,et al.  Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798 nm , 1994 .

[7]  Perry,et al.  Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses. , 1995, Physical review letters.

[8]  Roland A. Sauerbrey,et al.  Fluence-dependent transmission of polyimide at 248 nm under laser ablation conditions , 1991 .

[9]  S. Mihailov,et al.  Fabrication of refractive microlens arrays by excimer laser ablation of amorphous Teflon. , 1993, Applied optics.

[10]  G. Koren Temporal measurements of photofragment attenuation at 248 nm in the laser ablation of polyimide in air , 1987 .

[11]  A. Serafetinides,et al.  Ablation of nylon-6,6 with UV and IR lasers , 1995 .

[12]  R. Sauerbrey,et al.  Pulsed ultraviolet laser ablation , 1993 .

[13]  Gerard Mourou,et al.  Laser‐induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs , 1994 .

[14]  Ferenc Krausz,et al.  Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps , 1996 .

[15]  Juergen Jandeleit,et al.  Picosecond laser ablation of thin copper films , 1996 .

[16]  David Ashkenasi,et al.  Laser-induced damage in SiO2 and CaF2 with picosecond and femtosecond laser pulses , 1996 .