Moving from analysis to design: a MEMS CAD tool evolution

The latest advances in MEMS technology have enabled the design of a new generation of electronic microsystems products. These systems may combine numerous analog/mixed signal microelectronics blocks and MEMS functions on a single chip or on two or more chips assembled within an integrated package. As designers have begun to use CAD tools to insert MEMS into these new products, additional requirements and constraints on the tools are emerging. As the MEMS designs move from prototypes to manufacturing production new CAD issues emerge.