Micromachined rotating gyroscope with electromagnetically levitated rotor

A type of micromachined rotating gyroscope with an electromagnetically levitated rotor is proposed. The working mechanism and the fabrication method based on MEMS technology of micromachined gyroscopes are described. The experiment showed that the vacuum package can increase the rotating speed of the rotor (diameter, 2.2 mm; thickness, 20 µm) from 800 to 4000 rpm. Possible reasons that resist further increase of rotating speed are air slip damping and electromagnetic damping. Sensing precision of 3°/s was obtained in the experiment.