Reference data generating method for inspecting a circuit

The present invention relates to a reference data generating method for inspecting a substrate. The reference data generating method for inspecting a substrate includes: acquiring image information with respect to a bare substrate by scanning the bare substrate; generating a compensation matrix by using pad coordinate information extracted from the image information and pad coordinate information of stored design information; and generating reference data including coordinate information of a characteristic object by applying the compensation matrix to the image information. According to the above method, work efficiency may be maximized by rapidly generating reference data without generating cad information necessary for inspecting the substrate.