A reproducing kernel particle method for meshless analysis of microelectromechanical systems

Abstract Many existing computer-aided design systems for microelectromechanical systems require the generation of a three-dimensional mesh for computational analysis of the microdevice. Mesh generation requirements for microdevices are very complicated because of the presence of mixed-energy domains. Point methods or meshless methods do not require the generation of a mesh, and computational analysis can be performed by sprinkling points covering the domain of the microdevice. A corrected smooth particle hydrodynamics approach also referred to as the reproducing kernel particle method is developed here for microelectromechanical applications. A correction function that establishes the consistency and the stability of the meshless method is derived. A simple approach combining the constraint elimination and the Lagrange multiplier technique is developed for imposition of boundary conditions. Numerical results are shown for static and dynamic analysis of microswitches and electromechanical pressure sensors. The accuracy of the meshless method is established by comparing the numerical results obtained with meshless methods with previously reported experimental and numerical data.

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