Pixelated mask spatial carrier phase shifting interferometry algorithms and associated errors.

In both temporal and spatial carrier phase shifting interferometry, the primary source of phase calculation error results from an error in the relative phase shift between sample points. In spatial carrier phase shifting interferometry, this phase shifting error is caused directly by the wavefront under test and is unavoidable. In order to minimize the phase shifting error, a pixelated spatial carrier phase shifting technique has been developed by 4D technologies. This new technique allows for the grouping of phase shifted pixels together around a single point in two dimensions, minimizing the phase shift change due to the spatial variation in the test wavefront. A formula for the phase calculation error in spatial carrier phase shifting interferometry is derived. The error associated with the use of linear N-point averaging algorithms is presented and compared with those of the pixelated spatial carrier technique.

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