论文信息 - A solid-state pressure-sensing microsystem for biomedical applications

A solid-state pressure-sensing microsystem for biomedical applications

Abstract A pressure-sensing system consisting of a miniature silicon capacitive-type sensor, made with the silicon fusion bonding technique, and a detection integrated circuit is presented. The entire system converts pressure changes, in the pressure range useful for biomedical applications, to frequency changes. The system is equipped with a reference capacitor to cancel out the temperature dependence and the ageing effects.

Stavros Chatzandroulis | Pascal Normand | D. Goustouridis | Dimitris Tsoukalas

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