Magnetically levitated planar actuator with moving magnets : electromechanical analysis and design

Magnetically levitated planar actuator with moving magnets: Electromechanical analysis and design Magnetically levitated planar actuators are developed as alternatives to xy-drives, which are constructed of stacked linear motors in high-precision industrial applications. The translator of these planar actuators is suspended above the stator with no support other than magnetic fields. Because of the active magnetic bearing the translator can move in six degrees-of-freedom. This thesis presents the electromechanical analysis and design of a contactless, magnetically levitated, planar actuator with moving magnets. This planar actuator consists of a stationary coil array with concentrated non-overlapping windings and a translator with a permanentmagnet array with a quasi-Halbach magnetization. As only the coils below the magnet array can produce significant force and torque, the set of active coils is switched during the movements of the translator in the xy-plane. As a result, the stroke in the xy-plane can be made, in theory, infinitely long. The ironless planar actuator has a three-dimensional, non-periodical and nonsymmetrical electromechanical structure, which require a multi-physical approach to analyze. To predict the force and torque in this type of structures, three different magnetostatic models have been developed. These models differ in accuracy and calculation time, and are applied for the analysis, design and control of the planar actuator. The models are based on different analytical solutions of the magnetic flux density distribution of the permanent magnet array and on both analytical and numerical solutions of the Lorentz force and torque integrals. Due to the integration of propulsion in the xy-plane with an active magnetic bearing, standard decoupling schemes for synchronous machines cannot be applied iii

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