Optimized plasma-assisted bi-layer photoresist fabrication protocol for high resolution microfabrication of thin-film metal electrodes on porous polymer membranes
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P. Ertl | H. Wanzenboeck | M. Rothbauer | P. Schuller | S. R. Kratz | M. Schinnerl | J. Genser | P. Taus | Christoph Eilenberger | Gregor Höll
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