Accurate RBS Measurements of the Indium Content of InGaAs Thin Films

In x Ga 1~x As been analysed and values of x obtained with an estimated accuracy of ?1% in most cases. The observed variation in two measurements of a set of nine samples with a range of values of x has a mean of 1.000 and a standard deviation of 2.2%. This observed error is not inconsistent (at the 5% signi‐cance level) with the estimated error. The analytical method described is valid for many compound thin ‐lms. 1997 by John Wiley & Sons, Ltd.