Low power consumption micro C2H5OH gas sensor based on micro-heater and ink jetting technique

Abstract Micro alcohol gas sensor was fabricated based on micro-heater by using CMOS compatible MEMS process and ink jetting technique. The paste for ink jetting deposition was based on semiconducting In2O3 powder. In the structure of micro-heater, two semi-circled Pt heaters, where some etching holes including etching hole in the center of the micor-heater exist, are connected to the spreader for thermal uniformity and reduction of the Si etching time. Based on the above design, low power consumption alcohol gas sensor was fabricated, which showed substantial sensitivity down to 0.05 ppm alcohol at low power consumption (24 mW).

[1]  Noboru Yamazoe,et al.  Toward innovations of gas sensor technology , 2005 .

[2]  M. Gaitan,et al.  Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing , 1993, IEEE Electron Device Letters.

[3]  Kagan Kerman,et al.  Development of a novel hand-held formaldehyde gas sensor for the rapid detection of sick building syndrome , 2005 .

[4]  N. Bârsan,et al.  Metal oxide-based gas sensor research: How to? , 2007 .

[5]  Gian Carlo Cardinali,et al.  Selectivity enhancement of metal oxide gas sensors using a micromachined gas chromatographic column , 2005 .

[6]  Gang Zhang,et al.  Quantitative assessment on the cloning efficiencies of lentiviral transfer vectors with a unique clone site , 2012, Scientific Reports.

[7]  Andreas Hierlemann,et al.  CMOS microhotplate sensor system for operating temperatures up to 500 °C , 2006 .

[8]  Xuejun Zheng,et al.  Improved NH3, C2H5OH, and CH3COCH3 sensing properties of SnO2 nanofibers by adding block copolymer P123 , 2009 .

[9]  Chang Auck Choi,et al.  Low power consumption micro C2H5OH gas sensor based on micro-heater and screen printing technique , 2013 .

[10]  Il-Doo Kim,et al.  Electronic sensitization of the response to C2H5OH of p-type NiO nanofibers by Fe doping , 2013, Nanotechnology.

[11]  Koji Inoue,et al.  Low-voltage and low-power optimization of micro-heater and its on-chip drive circuitry for gas sensor array , 2002 .

[12]  Optimization of a wafer-level process for the fabrication of highly reproducible thin-film MOX sensors , 2008 .

[13]  Zhi-xuan Cheng,et al.  Indium Oxide with Novel Morphology: Synthesis and Application in C2H5OH Gas Sensing , 2009 .

[14]  Florin Udrea,et al.  Novel design and characterisation of SOI CMOS micro-hotplates for high temperature gas sensors , 2007 .

[15]  C. Hagleitner,et al.  Smart single-chip gas sensor microsystem , 2001, Nature.

[16]  Andrei Gurtov,et al.  A Strong Authentication Scheme with User Privacy for Wireless Sensor Networks , 2013 .

[17]  Pierre Temple-Boyer,et al.  Realization and performance of thin SiO2/SiNx membrane for microheater applications , 1998 .

[18]  Yun Chan Kang,et al.  Enhanced C2H5OH sensing characteristics of nano-porous In2O3 hollow spheres prepared by sucrose-mediated hydrothermal reaction , 2011 .

[19]  Ho Won Jang,et al.  Self-activated ultrahigh chemosensitivity of oxide thin film nanostructures for transparent sensors , 2012, Scientific Reports.

[20]  Nak-Jin Choi,et al.  Semiconductor‐Type MEMS Gas Sensor for Real‐Time Environmental Monitoring Applications , 2013 .

[21]  Makoto Egashira,et al.  Basic Aspects and Challenges of Semiconductor Gas Sensors , 1999 .

[22]  A. Taroni,et al.  A novel PVD technique for the preparation of SnO2 thin films as C2H5OH sensors , 1992 .

[23]  Eduard Llobet,et al.  Development of high sensitivity ethanol gas sensors based on Pt-doped SnO2 surfaces , 2004 .

[24]  Nak-Jin Choi,et al.  Fast response formaldehyde gas sensor for USN application , 2012 .

[25]  Woo Seok Yang,et al.  Encapsulation of Semiconductor Gas Sensors with Gas Barrier Films for USN Application , 2012 .